Stability of Nitrogen and Hydrogen in High-k Dielectrics.
| Autor: | Bastos, K. P., Pezzi, R. P., Miotti, L., Soares, G. V., Driemeier, C., Morais, J., Baumvol, I. J. R. |
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| Zdroj: | MRS Online Proceedings Library; 2003, Vol. 786 Issue 1, p1-11, 11p |
| Databáze: | Complementary Index |
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