Instability formation in epitaxial SiGe lines under hydrogen annealing.
Autor: | Seiss, Birgit, Brémond, Georges, Dutartre, Didier |
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Zdroj: | MRS Online Proceedings Library; 2013, Vol. 1551 Issue 1, p87-92, 6p |
Databáze: | Complementary Index |
Externí odkaz: |