Effect of Tool Kinematics, Brush Pressure and Cleaning Fluid pH on Coefficient of Friction and Tribology of post-CMP PVA Brush Scrubbing Processes.
| Autor: | Philipossian, Ara, Mustapha, Lateef |
|---|---|
| Zdroj: | MRS Online Proceedings Library; 2003, Vol. 767 Issue 1, p1-7, 7p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|
Full text from SpringerLink