Structural and Chemical Characterization of Tungsten Gate Stack for 1 Gb Dram.

Autor:	Gluschenkov, O., Benedict, J., Clevenger, L. A., DeHaven, P., Dziobkowski, C., Faltermeier, J., Lin, C., McStay, I., Wong, K.
Zdroj:	MRS Online Proceedings Library; 2000, Vol. 611 Issue 1, p1-6, 6p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu Full text from SpringerLink