Analysis of failure of C-V characteristics of MIS structure with SiO2 passivation layer deposited on InSb substrate via Raman spectroscopy.

Autor: Seok, Chulkyun, Kim, Sujin, Lee, Jaeyel, Park, Sehun, Park, Yongjo, Yoon, Euijoon
Zdroj: MRS Online Proceedings Library; 2014, Vol. 1670 Issue 1, p25-30, 6p
Databáze: Complementary Index