Analysis of failure of C-V characteristics of MIS structure with SiO2 passivation layer deposited on InSb substrate via Raman spectroscopy.
Autor: | Seok, Chulkyun, Kim, Sujin, Lee, Jaeyel, Park, Sehun, Park, Yongjo, Yoon, Euijoon |
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Zdroj: | MRS Online Proceedings Library; 2014, Vol. 1670 Issue 1, p25-30, 6p |
Databáze: | Complementary Index |
Externí odkaz: |