SiGe Thermoelectric Film for Gas Sensor Micro-Devices.
| Autor: | Shin, Woosuck, Tajima, Kazuki, Choi, Yeongsoo, Izu, Noriya, Matsubara, Ichiro, Murayama, Norimitsu |
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| Zdroj: | MRS Online Proceedings Library; 2004, Vol. 828 Issue 1, p297-301, 5p |
| Databáze: | Complementary Index |
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