Evaluation of Ar-Diluted Silane PECVD for Thin Film Si:H Based Solar Cells.

Autor: Selvan, J. A. Anna, Li, Yuan-Min, Li, Liwei, Delahoy, Alan E.
Zdroj: MRS Online Proceedings Library; 2004, Vol. 808 Issue 1, p585-590, 6p
Databáze: Complementary Index
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