Prospects for dielectric constant reduction in integrated circuits interconnects.
| Autor: | Darnon, Maxime, Posseme, Nicolas, Chevolleau, Thierry, David, Thibaut L. |
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| Zdroj: | MRS Online Proceedings Library; 2014, Vol. 1692 Issue 1, p33-44, 12p |
| Databáze: | Complementary Index |
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