Effect of Annealing on Microstructure in (Doped and Undoped) Hydrogenated Amorphous Silicon Films.

Autor: Beyer, W., Hilgers, W., Lennartz, D., Maier, F.C., Nickel, N.H., Pennartz, F., Prunici, P.
Zdroj: MRS Online Proceedings Library; 2014, Vol. 1666 Issue 1, p36-41, 6p
Databáze: Complementary Index