Optical Emission Spectroscopy of Germane Plasma Produced in an Ecr Reactor.
| Autor: | deFreese, Matt, Dalal, Vikram L., Falter, Julie |
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| Zdroj: | MRS Online Proceedings Library; 2000, Vol. 664 Issue 1, p1-6, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | deFreese, Matt, Dalal, Vikram L., Falter, Julie |
|---|---|
| Zdroj: | MRS Online Proceedings Library; 2000, Vol. 664 Issue 1, p1-6, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|
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