Simulation of Ion-beam Induced Etching and Deposition Using a Non-local Recoil-based Algorithm.
Autor: | Ebm, Christoph, Hobler, Gerhard |
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Zdroj: | MRS Online Proceedings Library; 2009, Vol. 1181 Issue 1, p42-47, 6p |
Databáze: | Complementary Index |
Externí odkaz: |