In-Situ Friction and Pad Topography Measurements During CMP.
| Autor: | Gray, Caprice, Apone, Daniel, Bams, Chris, Monsour, Moinpour, Anjur, Sriram, Manno, Vincent, Rogers, Chris |
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| Zdroj: | MRS Online Proceedings Library; 2004, Vol. 816 Issue 1, p541-549, 9p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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