Low Energy Implantation of Boron with Decaborane Ions.
| Autor: | Albano, Maria A., Babaram, Vijay, Poate, John M., Sosnowski, Marek, Jacobson, Dale C. |
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| Zdroj: | MRS Online Proceedings Library; 2000, Vol. 610 Issue 1, p1-6, 6p |
| Databáze: | Complementary Index |
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