Atomistic Modeling of Complex Silicon Processing Scenarios.

Autor:	Jaraiz, Martin, Castrillo, Pedro, Pinacho, Ruth, Pelaz, Lourdes, Barbolla, Juan, Gilmer, George H., Rafferty, Conor S.
Zdroj:	MRS Online Proceedings Library; 2000, Vol. 610 Issue 1, p1-7, 7p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu Full text from SpringerLink