Understand ing and Modeling Ramp Rate Effects on Shallow Junction Formation.

Autor: Chakravarthi, Srinvasan, Gencer, Alp H., Dunham, Scott T., Downey, Daniel F.
Zdroj: MRS Online Proceedings Library; 2000, Vol. 610 Issue 1, p1-6, 6p
Databáze: Complementary Index