Understand ing and Modeling Ramp Rate Effects on Shallow Junction Formation.
Autor: | Chakravarthi, Srinvasan, Gencer, Alp H., Dunham, Scott T., Downey, Daniel F. |
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Zdroj: | MRS Online Proceedings Library; 2000, Vol. 610 Issue 1, p1-6, 6p |
Databáze: | Complementary Index |
Externí odkaz: |