Laser Processing of Amorphous Silicon for Polysilicon Devices, Circuits and Flat-Panel Imagers.
Autor: | Boyce, J. B., Fulks, R. T., Ho, J., Lu, J. P., Mei, P., Street, R. A., Schuylenbergh, K. F. Van, Wang, Y. |
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Zdroj: | MRS Online Proceedings Library; 2000, Vol. 609 Issue 1, p1-12, 12p |
Databáze: | Complementary Index |
Externí odkaz: |