Comparison of low temperature growth of Si thin films on amorphous substrates by MBE and PECVD methods.
| Autor: | Selvan, J. A. Anna, Grützmacher, D., Müller, E., Rebien, M., Kummer, M., von Känel, H., Gobrecht, J. |
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| Zdroj: | MRS Online Proceedings Library; 2000, Vol. 609 Issue 1, p1-6, 6p |
| Databáze: | Complementary Index |
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