Deposition of diamond/β-SiC gradient composite films by microwave plasma-assisted chemical vapor deposition.
Autor: | Shi, Yulong, Tan, Minhui, Jiang, X. |
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Zdroj: | Journal of Materials Research; Jun2002, Vol. 17 Issue 6, p1241-1243, 3p |
Databáze: | Complementary Index |
Externí odkaz: |