Accurate Dry Etching with Fluorinated Gas for Two-dimensional Si Photonic Crystal.
| Autor: | Takahashi, Chiharu, Takahashi, Jun-Ichi, Notomi, Masaya, Yokohama, Itaru |
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| Zdroj: | MRS Online Proceedings Library; 2000, Vol. 637 Issue 1, p1-6, 6p |
| Databáze: | Complementary Index |
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