Fabrication of MEMS Components Based on Ultrananocrystalline Diamond Thin Films and Characterization of Mechanical Properties.

Autor:	Sumant, A. V., Auciello, O., Krauss, A. R., Gruen, D. M., Ersoy, D., Tucek, J., Jayatissa, A., Stach, E., Moldovan, N., Mancini, D., Busmann, H. G., Meyer, E. M.
Zdroj:	MRS Online Proceedings Library; 2000, Vol. 657 Issue 1, p1-6, 6p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu Full text from SpringerLink