Nanofabrication with the Helium Ion Microscope.

Autor: Boden, Stuart A., Moktadir, Zakaria, Alkhalil, Feras M., Mizuta, Hiroshi, Rutt, Harvey N., Bagnall, Darren M.
Zdroj: MRS Online Proceedings Library; 2012, Vol. 1412 Issue 1, p43-48, 6p
Databáze: Complementary Index