Direct Patterning of Hydrogenated Amorphous Silicon by Near Field Scanning Optical Microscopy.
| Autor: | Hollingsworth, Russell E., Bradford, William C., Herndon, Mary K., Beach, Joseph D., Collins, Reuben T. |
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| Zdroj: | MRS Online Proceedings Library; 2000, Vol. 624 Issue 1, p87-97, 11p |
| Databáze: | Complementary Index |
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