Selective W for Coating and Releasing MEMS Devices.
| Autor: | Mani, S. S., Fleming, J. G., Sniegowski, J. J., de Boer, M. P., Irwin, L. W., Walraven, J. A., Tanner, D. M., La Van, D. A. |
|---|---|
| Zdroj: | MRS Online Proceedings Library; 1999, Vol. 605 Issue 1, p135-140, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|
Full text from SpringerLink