Two- and Three-Dimensional Ultrananocrystalline Diamond (UNCD) Structures for a High Resolution Diamond-Based MEMS Technology.

Autor:	Auciello, O., Krauss, A. R., Gruen, D. M., Meyer, E. M., Busmann, H. G., Tucek, J., Sumant, A., Jayatissa, A., Moldovan, N., Mancini, D. C., Gardos, M. N.
Zdroj:	MRS Online Proceedings Library; 1999, Vol. 605 Issue 1, p73-78, 6p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu Full text from SpringerLink