Effects of In-Situ DC-Bias on the Composition, Microstructures and Dielectric Properties of RF Magnetron Reactive Sputtered (Ba,Sr)TiO3 Films.

Autor:	Chan, Wen-Hao, Shen, Hui-Ling, Chou, Lih-Hsin, Wang, Jinn-Lung, Tsai, Jyi-Ching
Zdroj:	MRS Online Proceedings Library; 1999, Vol. 596 Issue 1, p43-48, 6p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu Full text from SpringerLink