Thin Polytetrafluoroethylene Organosilane Nanocomposite Films Used as Ultra Low Dielectric Constant Materials in Microelectronics.
| Autor: | Qu, Shichun, Rosenmayer, Tom, Xu, Ping, Spevack, Perry |
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| Zdroj: | MRS Online Proceedings Library; 1999, Vol. 581 Issue 1, p375-380, 6p |
| Databáze: | Complementary Index |
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