Stress and Deformation of Pzt Thin Film on Silicon Wafer Due to Thermal Expansion.
| Autor: | Zang, Ming, Polla, Dennis L., Zurn, Shayne M., Cui, Tianhong |
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| Zdroj: | MRS Online Proceedings Library; Dec1999, Vol. 574 Issue 1, p107-112, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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