Gate Stack Formation using a Fully Integrated Single Wafer Cluster Tool.
| Autor: | Frystak, David C., Kuehne, John, Wise, Rick, Fowler, Burt, Grothe, Phil, Barnett, Joel, Miner, Gary |
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| Zdroj: | MRS Online Proceedings Library; 1997, Vol. 470 Issue 1, p221-227, 7p |
| Databáze: | Complementary Index |
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