A Thermodynamic Approach to Selecting Alternative Gate Dielectrics.
Autor: | Schlom, Darrell G., Haeni, Jeffrey H. |
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Zdroj: | MRS Bulletin; Mar2002, Vol. 27 Issue 3, p198-204, 7p |
Databáze: | Complementary Index |
Externí odkaz: |
Autor: | Schlom, Darrell G., Haeni, Jeffrey H. |
---|---|
Zdroj: | MRS Bulletin; Mar2002, Vol. 27 Issue 3, p198-204, 7p |
Databáze: | Complementary Index |
Externí odkaz: |