Rotating-Compensator Multichannel Ellipsometry: Applications in Process Development for Nanocrystalline Diamond Thin Films.
| Autor: | Collins, R. W., Lee, Joungchel, Rovira, P. I., An, Ilsin |
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| Zdroj: | MRS Online Proceedings Library; 1997, Vol. 502 Issue 1, p23-34, 12p |
| Databáze: | Complementary Index |
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