The Roles of "3d/2d" and "3d/3d" Topography Simulators in Virtual Wafer Fabs.

Autor: Cale, T. S., Merchant, T. P., Borucki, L. J.
Zdroj: MRS Online Proceedings Library; 1997, Vol. 490 Issue 1, p201-212, 12p
Databáze: Complementary Index
Externí odkaz: