Effect of Hydrogen Chloride on the Capacitance-Voltage Characteristics of MOCVD-Grown AlN/6H-SiC Mis Structures.
| Autor: | Tin, C. C., Gichuhi, A., Bozack, M. J., Shannon, C. G., Teh, C. K. |
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| Zdroj: | MRS Online Proceedings Library; 1997, Vol. 468 Issue 1, p475-479, 5p |
| Databáze: | Complementary Index |
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