Plasma Cleaning and Nitridation of Sapphire Substrates for AlxGa1-xN Epitaxy as Studied by ARXPS and XPD.

Autor:	Seelmann-Eggebert, M., Zimmermann, H., Obloh, H., Niebuhr, R., Wachtendorf, B.
Zdroj:	MRS Online Proceedings Library; 1997, Vol. 468 Issue 1, p193-198, 6p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu Full text from SpringerLink