Evolution of Texture and Microstructure in Rough Polycrystalline Silicon for Advanced Dram Applications.
| Autor: | Banerjee, A., Wise, R. L., Crenshaw, D. L., Khamankar, R. B., Edwards, Hal |
|---|---|
| Zdroj: | MRS Online Proceedings Library; Dec1997, Vol. 472 Issue 1, p433-438, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|
Full text from SpringerLink