| Autor: |
Chi-Hsin Yang, Kun-Chieh Wang, Long Wu |
| Předmět: |
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| Zdroj: |
Sensors & Materials; 2020, Vol. 32 Issue 10, Part 3, p3343-3354, 12p |
| Abstrakt: |
In this study, we examine an adaptive two-stage sliding mode control scheme for an electrostatically actuated micro-electromechanical (MEM) actuator. The objective of the control scheme is to regulate the position of the movable plate in the MEM actuator by voltage control. For accurate measurements of system states, direct detection is possible by means of an existing sensing technique. Two main steps are applied to design the closed-loop control system. Firstly, for the dynamical model of the MEM actuator, a normalized time-scale approach and a nonlinear state transformation are introduced. Then, the adaptive two-stage sliding mode control is designed to achieve the control goal. The stability of the closed-loop control is proven and numerical studies to verify the control scheme are also performed. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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