Microstructural Changes in W-Polycide Gates Capped with a Thin Polysilicon Layer.
| Autor: | Kima, Y. O., Bevk, J., Furtsch, M., Georgiou, G. E., Mansfield, W., Masaitis, R., Opila, R., Silverman, P. J. |
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| Zdroj: | MRS Online Proceedings Library; 1998, Vol. 523 Issue 1, p109-113, 5p |
| Databáze: | Complementary Index |
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