Low-Temperature Floating Plasma Oxidation of Poly-SiGe.

Autor: Fan, Zhineng, Zhao, Gang, Chu, Paul K., Jin, Zhonghe, Kwok, Hoi S., Wong, Man
Zdroj: MRS Online Proceedings Library; 1998, Vol. 508 Issue 1, p157-160, 4p
Databáze: Complementary Index