Low-Temperature Floating Plasma Oxidation of Poly-SiGe.
Autor: | Fan, Zhineng, Zhao, Gang, Chu, Paul K., Jin, Zhonghe, Kwok, Hoi S., Wong, Man |
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Zdroj: | MRS Online Proceedings Library; 1998, Vol. 508 Issue 1, p157-160, 4p |
Databáze: | Complementary Index |
Externí odkaz: |