Effect of Hydrogen Plasma Treatments at very High Frequency on p-Type Amorphous and Microcrystalline Silicon Films.

Autor:	Centurioni, E., Desalvo, A., Pinghini, R., Rizzoli, R., Summonte, C., Zignani, F.
Zdroj:	MRS Online Proceedings Library; Dec1998, Vol. 536 Issue 1, p517-522, 6p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu Full text from SpringerLink