Intrinsic Gettering of Nickel and Copper for Advanced Low Temperature Device Processes.

Autor: Ogushi, S., Reilly, N., Sadamitsu, S., Koike, Y., Sano, M.
Zdroj: MRS Online Proceedings Library; Dec1998, Vol. 510 Issue 1, p227-232, 6p
Databáze: Complementary Index
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