Mechanical Properties and Adhesion of PZT Thin Films for MEMS.

Autor: Jungk, J. M., Crozier, B. T., Bandyopadhyay, A., Moody, N. R., Bahr, D. F.
Zdroj: MRS Online Proceedings Library; Dec1999, Vol. 561 Issue 1, p225-230, 6p
Databáze: Complementary Index
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