Study of Electrochemical Deposition of Copper and Microstructure Evolution in Fine Lines.
| Autor: | Grunow, Stephan, Diatezua, Deda, Seo, Soon-Cheon, Stoner, Timothy, KaloyerosI, Alain E. |
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| Zdroj: | MRS Online Proceedings Library; Dec1999, Vol. 561 Issue 1, p243-248, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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