Process and Manufacturing Challenges for High-K Gate Stack Systems.

Autor: Gilmer, M. C., Luo, T. Y., Huff, H. R., Jackson, M. D., Kim, S., Bersuker, G., Zeitzoff, P., Vishnubhotla, L., Brown, G. A., Amos, R., Brady, D., Watt, V. H. C., Gale, G., Guan, J., Nguyen, B., Williamson, G., Lysaght, P., Torres, K., Geyling, F., Gondran, C. F. H.
Zdroj: MRS Online Proceedings Library; 1999, Vol. 567 Issue 1, p323-341, 19p
Databáze: Complementary Index
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