Plasma Deposition of Diamond-Like Carbon and Carbon-Nitride Films in an Electron Cyclotron Resonance-Radio Frequency Discharge.
| Autor: | Turban, Guy, Zarrabian, Marjan, Hong, Junegie |
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| Zdroj: | MRS Online Proceedings Library; 1998, Vol. 544 Issue 1, p89-100, 12p |
| Databáze: | Complementary Index |
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