Next generation nanomachining process technologies.
| Autor: | Preil, Moshe E., Renwick, Stephen P., Cadena, Maria J., Robinson, Tod, Klos, Marty |
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| Zdroj: | Proceedings of SPIE; 8/3/2020, Vol. 11518, p115180C-115180C-16, 1p |
| Databáze: | Complementary Index |
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