Correlating Shear Force and Coefficient of Friction to Platen Motor Current in Copper, Cobalt, and Shallow Trench Isolation Chemical Mechanical Planarization at Steady-State Conditions.
| Autor: | Frank, C., Headley, R., Sampurno, Y., Philipossian, A. |
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| Zdroj: | ECS Journal of Solid State Science & Technology; 2020, Vol. 9 Issue 2, p1-10, 10p, 2 Charts, 12 Graphs |
| Databáze: | Complementary Index |
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