| Autor: |
Zhilova, O. V., Makagonov, V. A., Sitnikov, A. V., Pankov, S. Yu., Kalinin, Yu. E., Kashirin, M. A., Babkina, I. V., Kopytin, M. N. |
| Zdroj: |
Bulletin of the Russian Academy of Sciences: Physics; Sep2020, Vol. 84 Issue 9, p1104-1106, 3p |
| Abstrakt: |
Multilayer films (In2O3/SnO2)69 are obtained via ion-beam sputtering. The effect vacuum heat treatment in the range of room temperature to 600°C has on the structure and electrical properties is studied. It is found that the structures obtained with different thicknesses of the In2O3/SnO2 bilayer are stable up to a heat treatment temperature of 400°С. Raising the temperature to 600°C alters the sign of the coefficient of temperature resistance from negative to positive. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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