| Autor: |
Polyakov, A. Y., Lee, In-Hwan, Miakonkikh, Andrew, Chernykh, A. V., Smirnov, N. B., Shchemerov, I. V., Kochkova, A. I., Vasilev, A. A., Pearton, S. J. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 5/7/2020, Vol. 127 Issue 17, p1-8, 8p, 7 Graphs |
| Abstrakt: |
Bulk n-type β-Ga2O3 samples with orientation (−201) and (010) were exposed to a high density hydrogen plasma at 330 °C for 0.5 h. The effects were radically different for the two orientations. For the (−201) sample, H plasma exposure increased the net surface concentration of shallow donors from 2.7 × 1017 cm−3 to 2.6 × 1018 cm−3, with the shallow donors having an ionization energy close to 20 meV as deduced from the temperature dependence of the series resistance of Ni Schottky diodes. By sharp contrast, H plasma exposure of the (010) sample led to a strong decrease in the net shallow donor density from 3.2 × 1017 cm−3 to below 1015 cm−3 in the top 0.9 μm of the sample and to 3.2 × 1016 cm−3 near the edge of the space charge region at 0 V, with the total width of the region affected by plasma treatment being close to 1.1 μm. For both orientations, we observed a major decrease in the concentration of the dominant E2 traps near Ec-0.82 eV related to Fe acceptors. The deep trap spectra in hydrogenated samples were dominated by the E2* traps commonly ascribed to native defects in β-Ga2O3. The peak of these traps with a level near Ec-0.74 eV was masked in the starting samples by the peak of the E2 Fe acceptors present in high concentration, so that E2* only broadened the Fe peak on the low temperature side, but could be revealed by the modeling of the spectra. The concentration of the E2* center was not strongly affected in the hydrogen-treated samples with orientation (010), but in the (−201) samples, the concentration of the E2* peak was greatly enhanced. The results are discussed in conjunction with previous reports on hydrogen plasma treatment of β-Ga2O3 and on obtaining p-type conductivity in the surface layers of β-Ga2O3 crystals annealed in molecular hydrogen at high temperatures [Islam et al., Sci. Rep. 10, 6134 (2020)]. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
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