Study of dielectric properties of resistive thin-film coatings based on silicon nitride compositions.
| Autor: | Derbov, Vladimir L., Starodubov, Andrey V., Serdobintsev, Alexey A., Kozhevnikov, Ilya O., Pavlov, Anton M., Galushka, Viktor V., Makarkin, Stanislav A. |
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| Zdroj: | Proceedings of SPIE; 6/4/2020, Vol. 11458, p1145810-1145810, 1p |
| Databáze: | Complementary Index |
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