Simulation of terahertz waves in multilayer coatings for non-contact thickness measurements of top layers.
Autor: | Sadwick, Laurence P., Yang, Tianxin, Busboom, Imke, Christmann, Simon, Haehnel, Hartmut, Feige, Volker K. S., Tibken, Bernd |
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Zdroj: | Proceedings of SPIE; 12/8/2019, Vol. 11279, p112790J-112790J-11, 1p |
Databáze: | Complementary Index |
Externí odkaz: |