| Autor: |
Zhang, Fengyuan, Edwards, David, Deng, Xiong, Wang, Yadong, Kilpatrick, Jason I., Bassiri-Gharb, Nazanin, Kumar, Amit, Chen, Deyang, Gao, Xingsen, Rodriguez, Brian J. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 1/21/2020, Vol. 127 Issue 3, p1-10, 10p, 5 Graphs |
| Abstrakt: |
Atomic force microscopy (AFM) has been utilized for nanomechanical machining of various materials including polymers, metals, and semiconductors. Despite being important candidate materials for a wide range of applications including data storage and actuators, ferroelectric materials have rarely been machined via AFM. AFM-based machining of ferroelectric nanostructures offers advantages over established techniques, such as bottom-up approaches and focused ion beam milling, in select cases where low damage and low-cost modification of already-fabricated thin films are required. Through a systematic investigation of a broad range of AFM parameters, we demonstrate that AFM-based machining provides a low-cost option to rapidly modify local regions of the film, as well as fabricate a range of different nanostructures, including a nanocapacitor array with individually addressable ferroelectric elements. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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